Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology by Marc J. Madou is an English-language textbook that provides an in-depth theoretical foundation for MEMS and NEMS, focused on nanotechnology and the underlying scientific principles. The book covers essential topics such as solid-state physics, quantum mechanics, and the properties of silicon in a technical context.
The book discusses the historical development of Si, MEMS, and NEMS, followed by an analysis of crystallography, the band theory of solids, and the unique properties of silicon single crystals. In addition, advanced topics are addressed, such as photonics, the quantum Hall effect, superconductivity, and analytical techniques for miniaturization.
Features:
- Comprehensive treatment of quantum mechanics and its role in nanotechnology and NEMS
- Focus on the electronic, mechanical, and optical properties of solids
- Analysis of fluidics and electromechanical processes within micro- and nanosystems
- Includes practical examples, deeper references, and a glossary of terms
This textbook is suitable for students and professionals in science and engineering, with connections to environmental science, physics, and microelectronics.