Principles of Plasma Discharges and Materials Processing Michael A. Lieberman and Allan J. Lichtenberg is an English-language textbook aimed at professionals in materials processing. The book covers the fundamental principles of plasma discharges and their applications in advanced materials processing.
This title provides an overview of plasma-based technologies that are central to micro- and nano-electronics, such as anisotropic plasma etching and plasma deposition. The book offers new insights into high-pressure capacitive discharges, along with in-depth analyses of plasma chemistry, physics, and diagnostics. By combining theory and practical procedures, it is an essential reference work for designing and analyzing processes involving plasma discharges and materials.
The book is relevant for professionals and process engineers who work with plasma-assisted materials processing and aligns with topics such as engineering applications of electronic, magnetic, optical materials and atomic and molecular physics, within the field of technology and engineering.