Microsystem Design Stephen D. Senturia is an English-language textbook that focuses on microsystem design. This book is intended for engineers and students who want to delve into the development and application of microsystems.
It covers the integration of techniques and principles used in the design of microsystems, addressing aspects such as integrated sensors and microfabrication processes. The book describes the historical and technological background, including extensive discussion of the use of selective anisotropic etching processes and bulk micromachining. This provides a complete overview of the methods used to shrink systems down to the micro- and nanoscale.
The content aligns with fields such as Electrical Engineering and technologies for electronic, magnetic, and optical materials. Microsystem Design is suitable for anyone who wants to get oriented or go deeper into this specialized technical subject.