Introduction to Microfabrication Sami Franssila, affiliated with Helsinki University of Technology, is a solid textbook that provides insight into microfabrication techniques for modern micro- and nanodevices. This reference work is suitable for senior undergraduate and beginning master’s students as well as professionals seeking deeper understanding of fabrication processes in electronics and materials science. The second edition has been fully updated and expanded with five new chapters, covering recent developments in the field.
Contents and features
The book covers the principles and applications of microfabrication, ranging from nanometer-scale probes to large solar cells. Topics such as wafer engineering, patterning, thin films, and bonding are discussed in depth. Extensive sections address MEMS, microfluidics, polymers, glass processing, and serial processing methods. It also provides 300 practice problems and their solutions on the website, aimed at conceptual and practical skills.
Product specifications
- Author: Sami Franssila (Helsinki University of Technology, Finland)
- Publisher: John Wiley & Sons Inc
- Publication date: 2010-09-17
- Number of pages: 536
- ISBN: 9780470749838
- Subject: Electronics and communications engineering
- BISAC: TECHNOLOGY & ENGINEERING / Electronics / General
About the author
Professor Sami Franssila is affiliated with Helsinki University of Technology and specializes in micro- and nanofabrication for chemical and biological applications. He leads the Microfabrication group at Micronova and has extensive experience in teaching and research since 1998. Franssila is also the author of the first work Introduction to Microfabrication, which, in addition to this handbook, serves as a practical reference for engineers and scientists.