The Science of Microfabrication In Chris Mack offers a thorough description of optical lithography, aimed at students and researchers in microfabrication. This study book covers fundamental principles and practical applications, including theoretical background and simulation exercises.
Description
Microfabrication of integrated circuits requires various processes such as thin-film deposition, patterning, and doping of semiconductors. Optical lithography forms the core of these processes because it creates three-dimensional structures on the substrate for pattern transfer.
This book presents a complete treatment of this technique and consists of ten chapters and three appendices, each concluded with practice problems. The reader gains insight into the fundamental principles of optical lithography and its applications in microelectronics.
Specifications
- Author: Chris Mack (Lithoguru.com)
- Publisher: John Wiley & Sons Inc
- Publication date: November 16, 2007
- Number of pages: 544
- ISBN: 9780470727300
- Subject: Mechanical engineering and materials
- BISAC: TECHNOLOGY & ENGINEERING / Mechanical
About the author
Chris A. Mack is Vice-President of Lithography Technology at Lithoguru.com and a recognized expert in the field of optical lithography.