Fabrication Engineering at the Micro- and Nanoscale is a textbook by Stephen A. Campbell, intended for advanced students in engineering. This book covers the fundamental fabrication processes for semiconductors and microelectronic components at the nanoscale. It provides a thorough overview of the technical foundation required for production and development work in micro- and nanotechnology.
Description
This handbook on fabrication engineering describes the core processes for manufacturing integrated circuits and other micro- and nanodevices. With clear examples and illustrations, it helps the user understand the latest fabrication technologies in engineering at the microscale and nanoscale.
Product specifications
- Author: Stephen A. Campbell
- Series: The Oxford Series in Electrical and Computer Engineering
- Publisher: Oxford University Press Inc
- Publication date: 2012-12-20
- Number of pages: 688
- ISBN: 9780199861224
- Subject: Mechanical engineering and materials
- BISAC: TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
About the author
Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.