{"product_id":"fundamental-principles-of-optical-lithography-the-science-of-microfabrication-chris-mack-lithoguru-com-9780470727300","title":"Fundamental Principles of Optical Lithography: The Science of Microfabrication","description":"\u003cp\u003e\u003cstrong\u003eThe Science of Microfabrication\u003c\/strong\u003e In Chris Mack offers a thorough description of optical lithography, aimed at students and researchers in microfabrication. This study book covers fundamental principles and practical applications, including theoretical background and simulation exercises.\u003c\/p\u003e\u003ch3\u003eDescription\u003c\/h3\u003e\u003cp\u003eMicrofabrication of integrated circuits requires various processes such as thin-film deposition, patterning, and doping of semiconductors. Optical lithography forms the core of these processes because it creates three-dimensional structures on the substrate for pattern transfer.\u003c\/p\u003e\u003cp\u003eThis book presents a complete treatment of this technique and consists of ten chapters and three appendices, each concluded with practice problems. The reader gains insight into the fundamental principles of optical lithography and its applications in microelectronics.\u003c\/p\u003e\u003ch3\u003eSpecifications\u003c\/h3\u003e\u003cp\u003e\u003c\/p\u003e\u003cul\u003e\u003cli\u003e\u003cstrong\u003eAuthor:\u003c\/strong\u003e Chris Mack (Lithoguru.com)\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003ePublisher:\u003c\/strong\u003e John Wiley \u0026amp; Sons Inc\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003ePublication date:\u003c\/strong\u003e November 16, 2007\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003eNumber of pages:\u003c\/strong\u003e 544\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003eISBN:\u003c\/strong\u003e 9780470727300\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003eSubject:\u003c\/strong\u003e Mechanical engineering and materials\u003c\/li\u003e\u003cli\u003e\u003cstrong\u003eBISAC:\u003c\/strong\u003e TECHNOLOGY \u0026amp; ENGINEERING \/ Mechanical\u003c\/li\u003e\u003cp\u003e\u003c\/p\u003e\u003c\/ul\u003e\u003ch3\u003eAbout the author\u003c\/h3\u003e\u003cp\u003eChris A. Mack is Vice-President of Lithography Technology at Lithoguru.com and a recognized expert in the field of optical lithography.\u003c\/p\u003e","brand":"Intertaal","offers":[{"title":"Default Title","offer_id":56354514796884,"sku":"9780470727300","price":71.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0967\/0538\/0692\/files\/fundamental-principles-optical-lithography-the-science-628.webp?v=1783597854","url":"https:\/\/intertaalid.nl\/en\/products\/fundamental-principles-of-optical-lithography-the-science-of-microfabrication-chris-mack-lithoguru-com-9780470727300","provider":"Intertaal","version":"1.0","type":"link"}